IBS has developed parts and services that offer a cost effective solution to maintaining semiconductor equipment. We offer a comprehensive line of both original parts and reverse engineered parts for all common makes and models of Ion Implanters. Manufacturered to the same tolerances of the original OEM parts you can rely on our products to deliver the same performance but at a reduced cost.
Spare parts supply
Maintaining semiconductor equipment is an expensive
operation, and consumables and non-consumables
utilize a major part of any wafer fab’s maintenance budget.
GO TO SPARE PARTS PAGE
EQUIPMENT UPGRADE
IBS has developed a full range of retrofits & upgrades
with the following objectives:
> Productivity & reliability improvement
> Cost saving
> Tool monitoring for fluids, gas, etc…
> Tool enhancement for new process
> Obsolescence management
Most of these improvements are already implemented in the IBS implanters.
To meet semiconductor manufacturers’ needs for high-performance,
maximum predictability, and low risk equipment, IBS’s equipment
refurbishment business provides refurbished legacy products.
Offerings include:
NV6200 series
NV8200 Series
GSD series
xR series
Quantum series
DF, 350D
E220/E500 series
IBS works with the following process:
> Onsite audit of the different key parameters that will influence on the work
to be done (equipment, facilities, expertise of the implant team, etc…)
> Proposal approval
> Decommissioning of the system
> Facilities checks and upgrade if necessary
> Equipment installation
> Hook-up
> Tool qualification with standard recipe (special recipes upon request)
IBS field service team offers a wide range of knowledge,
gained from 30 years of experience in the field of ion Implantation,
to help customers optimize their system's performance and reduce costs
IBS flexible support program
offers customized support packages for on-call labour and parts management. With offices in Europe and Asia, IBS has the ability to keep quality parts and service personnel close-by to help manage your installed base.
Onsite support program is possible
Our commissioning engineers are dedicated to helping you achieve your system qualification goals and will help you to manage a profitable usage of your tool